2025
- I. Orel, N. D. Lepikhin, D. Luggenhölscher, U. Czarnetzki, Z. Donkó:
"Space and time resolved characterization of a He–N2 RF atmospheric pressure plasma jet by E-FISH measurements and PIC/MCC simulations"
Plasma Sources Sci. Technol. 34, 06LT02 (2025)
- D. Yang, X.-K. Wang, Zh. Zhou, H. Li, W. Zhang, Y.-X. Liu, J. Schulze, P. Hartmann, Z. Donkó, Y. Fu:
"Discharge similarity in capacitive radio frequency carbon tetrafluoride plasmas"
Appl. Phys. Lett. 34, 124101 (2025)
- Li Wang, P. Hartmann, Z. Donkó, Yuan-Hong Song, J. Schulze:
"Electron power absorption dynamics and uniformity control in capacitive RF plasmas driven by planar segmented electrodes"
Plasma Sources Sci. Technol. 34, 075004 (2025)
- Zh. Zhou, X.-K. Wang, H. Li, D. Yang, W. Zhang, J. Schulze, P. Hartmann, Z. Donkó, Y.-X. Liu, Y. Fu:
"Dynamics of electron power absorption in capacitive radio-frequency CF4 plasmas operating in the striation mode"
Plasma Sources Sci. Technol. 34, 085014 (2025)
- E. Alfianto , K. Ikuse, Z. Donkó, S. Hamaguchi:
"Numerical simulation of chemical reactions in phosphate-buffered saline (PBS) exposed to helium pulsed plasmas at atmospheric pressure"
Jpn. J. Appl. Phys. 64, 046002 (2025)
- De-Hua Shi, Xiao-Kun Wang, Kai Zhao, Z. Donkó, J. Schulze, Yong-Xin Liu:
"Power dissipation during the ignition of pulse-modulated dual RF capacitively coupled argon plasmas at different pressures"
Plasma Sources Sci. Technol. 34, 055016 (2025)
- Li Wang, P. Hartmann, Z. Donkó, Yuan-Hong Song, J. Schulze:
"Plasma uniformity control in capacitive RF discharges by an individually RF driven sidewall electrode"
Plasma Sources Sci. Technol. 34, 045004 (2025)
- R. Masheyeva, M. Vass, M. Myrzaly, C.-B. Tian, K. Dzhumagulova, J. Schulze, Z. Donkó, J. Schulze:
"Experimental and numerical study of the ionization-attachment instability in an O2 capacitively coupled radio frequency plasma"
Plasma Sources Sci. Technol. 34, 045017 (2025)
- F. Beckfeld, R. Masheyeva, A. Derzsi, D. A. Schulenberg, I. Korolov, C. Bock, J. Schulze, Z. Donkó:
"Effective secondary electron yields for different surface materials in capacitively coupled plasmas"
Plasma Sources Sci. Technol. 34, 035009 (2025)
- B. Z. Bentz, P. Hartmann, A. Derzsi, K. Youngman, Z. Donkó:
"Electron density measurements and calculations in a helium capacitively-coupled radio-frequency plasma"
Plasma Sources Sci. Technol. 34, 025007 (2025)
- Lan-Yue Luo, Z. Donkó, R. Masheyeva, M. Vass, He-Ping Li, P. Hartmann:
"The quenching effect of oxygen addition on an argon capacitively coupled plasma: experimental and computational study of the argon metastable atom kinetics"
Plasma Sources Sci. Technol. 34, 015009 (2025)
- R. Masheyeva, P. Hartmann, L.-Y. Luo, K. Dzhumagulova, Y.-X. Liu, J. Schulze, Z. Donkó:
"On the in-situ determination of the effective secondary electron emission coefficient in low pressure capacitively coupled radio frequency discharges based on the electrical asymmetry effect"
Plasma Sources Sci. Technol. 34, 045208 (2025)
2024
- M. Vass, D. Schulenberg, Z. Donkó, P. Hartmann, D. Steuer, M. Böke, V. Schulz-von der Gathen, I. Korolov, T. Mussenbrock, J. Schulze:
"Energy efficiency of reactive species generation in radio frequency atmospheric pressure plasma jets driven by tailored voltage waveforms in a He/O2 mixture"
Plasma Sources Sci. Technol. 33, 11LT01 (2024)
- F. J. Arellano, M. Casaba, S. Wu, R. Yoshida, Z. Donkó, P. Hartmann, Ts. V. Tsankov, S. Hamaguchi:
"Machine learning-based prediction of the electron energy distribution function and electron density of argon plasma from the optical emission spectra"
J. Vac. Sci. Technol. A 42, 053001 (2024)
- X.-K. Wang, R. Masheyeva, Y.-X. Liu, Y.-H. Song, P. Hartmann, Z. Donkó, J. Schulze:
"Energy efficient F atom generation and control in CF4 capacitively coupled plasmas driven by tailored voltage waveforms"
Plasma Sources Sci. Technol. 33, 085006 (2024)
- X.-K. Wang, I. Korolov, S. Wilczek, R. Masheyeva, Y.-X. Liu, Y.-H. Song, P. Hartmann, Z. Donkó, J. Schulze:
"Hysteresis in radio frequency capacitively coupled CF4 plasmas"
Plasma Sources Sci. Technol. 33, 085001 (2024)
- Z. Donkó, Ts. V. Tsankov, P. Hartmann, F. J. Arellano, U. Czarnetzki, S. Hamaguchi:
"Self-consistent calculation of the optical emission spectrum of an argon capacitively coupled plasma based on the coupling of particle simulation with a collisional-radiative model"
J. Phys. D: Appl. Phys. 57, 375209 (2024)
- R. Masheyeva, M. Vass, X.-K. Wang, Y.-X. Liu, A. Derzsi, P. Hartmann, J. Schulze, Z. Donkó:
"Electron power absorption in CF4 capacitively coupled RF plasmas operated in the striation mode"
Plasma Sources Sci. Technol. 33, 045019 (2024)
- De-Hua Shi, Xiao-Kun Wang, Yong-Xin Liu, Z. Donkó, J. Schulze, You-Nian Wang:
"An experimental and computational study on the ignition process of a pulse modulated dual-RF capacitively coupled plasma operated at various low-frequency voltage amplitudes"
Plasma Sources Sci. Technol. 33, 025012 (2024)
- A. Derzsi, M. Vass, R. Masheyeva, B. Horvath, Z. Donko, P. Hartmann:
"Frequency-dependent electron power absorption mode transitions in capacitively coupled argon-oxygen plasmas"
Plasma Sources Sci. Technol. 33, 025005 (2024)
- M. Vass, D. Schulenberg, Z. Donko, I. Korolov, P. Hartmann, J. Schulze, T. Mussenbrock:
"A new 2D fluid-MC hybrid approach for simulating nonequilibrium atmospheric pressure plasmas: density distribution of atomic oxygen in radio-frequency plasma jets in He/O2 mixtures"
Plasma Sources Sci. Technol. 33, 015012 (2024)
- D. A. Schulenberg, M. Vass, M. Klich, Z. Donkó, J. Klotz, N. Bibinov, T. Mussenbrock, J. Schulze :
"Mode transition induced by gas heating along the discharge channel in capacitively coupled atmospheric pressure micro plasma jets"
Plasma Chemistry and Plasma Processing, https://doi.org/10.1007/s11090-023-10444-6 (2024)
2023
- F. J. Arellano, M. Gyulai, Z. Donkó, P. Hartmann, Ts. V. Tsankov, U. Czarnetzki, S. Hamaguchi:
"First-principles simulation of optical emission spectra for low-pressure argon plasmas and its experimental validation"
Plasma Sources Sci. Technol. 32, 125007 (2023)
- C.-W. Park, B. Horvath, A. Derzsi, J. Schulze, Z. Donkó, H.-C. Lee:
"Experimental validation of particle-in-cell/Monte Carlo collisions simulations in low-pressure neon capacitively coupled plasmas"
Plasma Sources Sci. Technol. 32, 115003 (2023)
- X.-K. Wang, R. Masheyeva, Y.-X. Liu, P. Hartmann, J. Schulze, Z. Donkó:
"The electrical asymmetry effect in electronegative CF4 capacitive RF plasmas operated in the striation mode"
Plasma Sources Sci. Technol. 32, 085009 (2023)
- J. Kuhfeld, N. D. Lepikhin, D. Luggenholscher, U. Czarnetzki, Z. Donkó:
"PIC/MCC simulation for a ns-pulsed glow discharge in nitrogen at sub-atmospheric pressure and analysis of its quasi-steady state physics"
Plasma Sources Sci. Technol. 32, 084001 (2023)
- N. D. Lepikhin, J. .Kuhfeld, Z. Donkó, D. Luggenholscher, U. Czarnetzki:
"Breakdown and quasi-DC phase of a nanosecond discharge: Comparison of optical emission spectroscopy measurements with numerical simulations"
Plasma Sources Sci. Technol. 32, 084002 (2023)
- L. Wang, P. Hartmann,, Z. Donkó, Y.-H. Song, J. Schulze:
"Effects of a radial variation of surface coefficients on plasma uniformity in capacitive RF discharges"
Plasma Sources Sci. Technol. 32, 045002 (2023)
- Z. Donkó, P. Hartmann, I. Korolov, D. Schulenberg, S. Rohr, S. Rauf, J. Schulze:
"Metastable argon atom kinetics in a low-pressure capacitively coupled radio frequency discharge"
Plasma Sources Sci. Technol. 32, 065002 (2023)
- S. Dujko, D. Bosnjakovic, M. Vass, P. Hartmann, I. Korolov, N. R. Pinhao, D. Loffhagen, Z. Donkó:
"Scanning drift tube measurements and kinetic studies of electron transport in CO"
Plasma Sources Sci. Technol. 32, 025014 (2023)
2022
- Z. Donkó:
"Vacuum ultraviolet radiation in and from an atmospheric pressure plasma source"
Plasma Sources Sci. Technol. 31, 095006 (2022)
- M. Vass, Li Wang, S. Wilczek, T. Lafleur, R. P. Brinkmann, Z. Donkó, J. Schulze:
"Frequency coupling in low-pressure dual-frequency capacitively coupled plasmas revisited based on the Boltzmann
term
analysis"
Plasma Sources Sci. Technol. 31, 115004 (2022)
- C. Schulze, Z. Donkó, J. Benedikt:
"A computationally assisted technique to measure material-specific surface coefficients in capacitively coupled
plasmas
based on characteristics of the ion flux-energy distribution function"
Plasma Sources Sci. Technol. 31, 105017 (2022)
- Li Wang, M. Vass, T. Lafleur, Z. Donkó, Yuan-Hong Song, J. Schulze:
"On the validity of the classical plasma conductivity in capacitive RF discharges"
Plasma Sources Sci. Technol. 31, 105013 (2022)
- A. Derzsi, P. Hartmann, M. Vass, B. Horváth, M. Gyulai, I. Korolov, J. Schulze, Z. Donkó:
"Electron power absorption in capacitively coupled neon-oxygen plasmas: a comparison of experimental and
computational results"
Plasma Sources Sci. Technol. 31, 085009 (2022)
- I. Adamovich et al.:
"The 2022 Plasma Roadmap: low temperature plasma science and technology"
J. Phys. D: Appl. Phys. 55, 373001 (2022)
- J. Durian, P. Hartmann, S. Matejcik, A. R. Gibson, Z. Donkó:
"Experimental and simulation study of a capacitively coupled radiofrequency plasma with a structured electrode"
Plasma Sources Sci. Technol. 31, 095001 (2022)
- Yan-Yan Fu, Xiao-Kun Wang, Yong-Xin Liu, J. Schulze, Z. Donkó, You-Nian Wang:
"Effects of 'step-like' amplitude-modulation on a pulsed capacitively coupled RF discharge: an experimental
investigation"
Plasma Sources Sci. Technol. 31, 085005 (2022)
- M. Vass, S. Wilczek, A. Derzsi, B. Horváth, P. Hartmann, Z. Donkó:
"Evolution of the bulk electric field in capacitively coupled argon plasmas at intermediate pressures"
Plasma Sources Sci. Technol. 31, 045017 (2022)
- Li Wang, M. Vass, Z. Donkó, P. Hartmann, A. Derzsi, Y.-H. Song, J. Schulze:
"Electropositive core in electronegative magnetized capacitive radio frequency plasmas"
Plasma Sources Sci. Technol. 31, 06LT01 (2022)
- Xiao-Kun Wang, Xiang-Yu Wang, Yong-Xin Liu, J. Schulze, Z. Donkó, You-Nian Wang:
"Striations in dual-low-frequency (2/10 MHz) driven capacitively coupled CF4 plasmas"
Plasma Sources Sci. Technol. 31, 064002 (2022)
- B. Horváth, Z. Donkó, J. Schulze, A. Derzsi:
"The critical role of electron induced secondary electrons in high-voltage and low-pressure capacitively coupled
oxygen
plasmas"
Plasma Sources Sci. Technol. 31, 045025 (2022)
- G. Hubner, L. Bischoff, I. Korolov, Z. Donkó, M. Leimkuhler, Y. Liu, M. Boke, V. Schulz-von der Gathen, T.
Mussenbrock, J. Schulze:
"The effects of driving frequencies on micro atmospheric pressure He-N2 plasma jets driven by tailored voltage
waveforms"
J. Phys. D: Appl. Phys. 55, 095204 (2022)
- M. Klich, S. Wilczek, Z. Donkó, R. P. Brinkmann:
"Simulation and modeling of radio-frequency atmospheric pressure plasmas in the non-neutral regime"
Plasma Sources Sci. Technol. 31, 045003 (2022)
2021
- M. Vass, S. Wilczek, J. Schulze, Z. Donkó:
"Electron power absorption in micro atmospheric pressure plasma jets driven by tailored voltage waveforms in
He/N2"
Plasma Sources Sci. Technol. 30, 105010 (2021)
- L. Wang, M. Vass, Z. Donkó, P. Hartmann, A. Derzsi, Y.-H. Song, J. Schulze:
"Magnetic attenuation of the self-excitation of the plasma series resonance in low-pressure capacitively coupled
discharges"
Plasma Sources Sci. Technol. 30, 10LT01 (2021)
- L. Wang, P. Hartmann, Z. Donkó, Y.-H. Song, J. Schulze:
"Effects of structured electrodes on electron power absorption and plasma uniformity in capacitive RF
discharges"
J. Vac. Sci. Technol. A. 39, 063004 (2021)
- D. A. Schulenberg, I. Korolov, Z. Donkó, A. Derzsi, J. Schulze:
"Multi-diagnostic experimental validation of 1d3v PIC/MCC simulations of low pressure capacitive RF plasmas
operated in argon"
Plasma Sources Sci. Technol. 30, 105003 (2021)
- Z. Donkó, A. Derzsi, M. Vass, B. Horvath, S. Wilczek, B. Hartmann, P. Hartmann:
"eduPIC: an introductory particle based code for radio-frequency plasma simulation"
Plasma Sources Sci. Technol. 30, 095017 (2021)
- I. Korolov, Z. Donkó, G Hubner, Y. Liu, T. Mussenbrock, J. Schulze:
"Energy efficiency of voltage waveform tailoring for the generation of excited species in RF plasma jets
operated in He/N2 mixtures"
Plasma Sources Sci. Technol. 30, 095013 (2021)
- P. Hartmann, L. Wang, K. Nosges, B. Berger, S. Wilczek, R. P. Brinkmann, T. Mussenbrock, Z. Juhasz, Z. Donkó,
A Derzsi, E.
Lee, J. Schulze:
"Control of electron velocity distributions at the wafer by tailored voltage waveforms in capacitively coupled
plasmas to compensate surface charging in high-aspect ratio etch features"
J. Phys. D: Appl. Phys. 54, 255202 (2021)
- M. Vass, S. Wilczek, T. Lafleur, R. P. Brinkmann, Z. Donkó, J. Schulze:
"Collisional electron momentum loss in low temperature plasmas: on the validity of the classical approximation"
Plasma Sources Sci. Technol. 30, 065015 (2021)
- L. Wang, P. Hartmann, Z. Donkó, Y.-H. Song, J. Schulze:
"2D particle-in-cell simulations of geometrically asymmetric low-pressure capacitive RF plasmas driven by
tailored
voltage waveforms"
Plasma Sources Sci. Technol. 30, 054001 (2021)
- R. U. Masheyeva, K. N. Dzhumagulova, M. Myrzaly, J. Schulze, Z. Donkó:
"Self-bias voltage formation and charged particle dynamics in multi-frequency capacitively coupled plasmas"
AIP Advances 11, 075024 (2021)
- Z. Juhasz, J. Durian, A. Derzsi, S. Matejcik, Z. Donkó, P. Hartmann:
"Efficient GPU implementation of the Particle-in-Cell/Monte-Carlo collisions method for 1D simulation of
low-pressure capacitively coupled plasmas"
Computer Phys. Commun. 263, 107913 (2021)
- X.-Y. Wang, J.-R. Liu, Y.-X. Liu, Z. Donkó, Q.-Z. Zhang, K. Zhao, J. Schulze, Y.-N. Wang:
"Comprehensive understanding of the ignition process of a pulsed capacitively coupled radio frequency discharge:
the
effect of power-off duration"
Plasma Sources Sci. Technol. 30, 075011 (2021)
- P. Magyar, G. J. Kalman, P. Hartmann, Z. Donkó:
"Anomalous behavior of plasma response functions at strong coupling"
Phys. Rev. E 104, 015202 (2021)
- M. Vass, A. Derzsi, J. Schulze, Z. Donkó:
"Intrasheath electron dynamics in low pressure capacitively coupled plasmas"
Plasma Sources Sci. Technol. 30, 03LT04 (2021)
- K. Soni, L. Moser, Z. Donkó, P. Hartmann, I. Korolov, R. Antunes, Z. Juhasz, R. Steiner, L. Marot, E.
Meyer:
"Experimental and numerical characterization of a radio-frequency plasma source with a DC-grounded electrode
configuration using a quarter-wavelength filter"
Plasma Phys. Controlled Fusion 63, 045005 (2021)
- M. Vass, E. Eguz, A. Chachereau, P. Hartmann, I. Korolov, A. Hosl, D. Bosnjakovic, S.
Dujko, Z. Donkó, C. M. Franck:
"Electron transport parameters in CO2: a comparison of two experimental systems and measured data"
J. Phys. D: Appl. Phys. 54, 035202 (2021)
- A. Albert, D. Bosnjakovic, S. Dujko, Z. Donkó:
"Monte Carlo simulation of resonance effects of electron transport in a spatially modulated electric field in
Ar, N2 and
their mixtures"
J. Phys. D: Appl. Phys. 54, 135202 (2021)